HfO2

Hafnium dioxide · Hafnia

Hafnium dioxide is a stable, insulating oxide that functions as a vital gate dielectric in modern semiconductor devices.

HfO
Crystal structure of HfO2 (monoclinic, P21/c (No. 14))
Ground-state structure · Materials Project
Overview

About Hafnium dioxide

Hafnium dioxide is a highly stable inorganic compound that serves as a critical insulating material in modern semiconductor manufacturing. Its wide-band-gap electronic character allows it to effectively prevent electron leakage in miniaturized electronic components, making it a cornerstone of contemporary transistor architecture. The material is noted for its exceptional structural diversity, with hundreds of reported configurations across various databases. This versatility, combined with its robust thermodynamic stability, ensures its continued relevance in high-performance technological applications where reliability and insulating performance are paramount.

At a glance

Key Properties

Cross-validated computational properties for Hafnium dioxide, aggregated across 5 databases.

Band Gap

3.39–4.67 eV
Range across DFT structures

Energy Above Hull

0.000 eV/atom
Best (lowest) across sources

Stability

On hull (stable)
3 DFT sources

Structures

510
5 databases, 56 space groups
Validation

Cross-Source DFT Agreement

How well independent DFT databases agree on the thermodynamics of HfO2. Tight agreement means computed properties can be trusted without re-running calculations.

Agreement Score

1.00 / 1.00
Trust tier: medium

Hull Spread

0.000 eV
EAH spread across sources

Sources Compared

2
jarvis, materials_project

Space Group Consensus

All match
Crystallography

Reported Structures

Lowest-energy structures reported for HfO2, ranked by energy above hull.

Space GroupCrystal SystemBand Gap (eV)E above hull (eV/atom)E/atom (eV)Density (g/cm³)
P21/c (No. 14)monoclinic4.020.0000-10.63810.24
Pbca (No. 61)orthorhombic4.110.0099-10.62810.25
Pbca (No. 61)orthorhombic4.230.0164-10.62110.70
Pca21 (No. 29)orthorhombic4.410.0220-10.61610.63
P42/mnm (No. 136)tetragonal3.900.0370-10.6019.41
Pbcn (No. 60)orthorhombic4.260.0393-10.5989.47
P42/nmc (No. 137)tetragonal4.670.0509-10.58710.68
Fm-3m (No. 225)cubic3.800.0836-10.55410.97
P21212 (No. 18)orthorhombic3.750.0853-10.55210.89
Pnma (No. 62)orthorhombic3.390.1393-10.49811.60
P1 (No. 1)triclinic3.620.2099-10.4288.93
P1 (No. 1)triclinic3.400.2168-10.4218.79
Uses

Applications

Where Hafnium dioxide is used.

High-k gate dielectricsOptical coatingsDynamic random-access memory (DRAM)Flash memory capacitors
Reference

Frequently Asked Questions

Common questions about Hafnium dioxide, answered from cross-validated data.

What is HfO2?

Hafnium dioxide is a stable, insulating oxide that functions as a vital gate dielectric in modern semiconductor devices.

More questions
What is HfO2 used for?
Hafnium dioxide (HfO2) is used in high-k gate dielectrics, optical coatings, dynamic random-access memory (DRAM), and flash memory capacitors.
What is the band gap of HfO2?
Hafnium dioxide (HfO2) has a DFT-computed band gap of 3.39–4.67 eV across 510 reported structures.
Is HfO2 a metal, semiconductor, or insulator?
With a wide band gap up to 4.67 eV it is an insulator / wide-band-gap material.
Is HfO2 thermodynamically stable?
Yes — Hafnium dioxide (HfO2) sits on the convex hull (energy above hull 0 eV/atom), i.e. on hull (stable).
What is the crystal structure of HfO2?
The lowest-energy reported polymorph of Hafnium dioxide (HfO2) is monoclinic symmetry, space group P21/c (No. 14).
What is the density of HfO2?
The computed density of the ground-state structure of Hafnium dioxide (HfO2) is 10.24 g/cm³.
How many polymorphs of HfO2 are known?
510 structures of HfO2 are reported across 5 databases, spanning 56 distinct space groups.
What elements does HfO2 contain?
Hafnium dioxide (HfO2) contains Hf and O (2 elements).
Where does the data for HfO2 come from?
HfO2 data is cross-referenced from materials_project, mpaloe, jarvis.
Comparison

How It Compares

As a primary material in the field of high-k dielectrics, hafnium dioxide stands as the industry standard for replacing traditional silicon-based insulators. Its unique combination of chemical inertness and electronic properties makes it the most significant member of its class for scaling down integrated circuits.

Data sources & attribution
  • materials_project — Data from the Materials Project. Cite: Jain et al., APL Materials 1, 011002 (2013).
  • mpaloe — Data from mpaloe.
  • jarvis — Data from JARVIS (NIST). Cite: Choudhary et al., npj Comp. Mater. 6, 173 (2020).

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